Theoretical Study of Porous Silicon Waveguides and Their Applicability for Vapour Sensing
نویسندگان
چکیده
The finite-element method (FEM) (Comsol RF Module) has been employed for modal analyses of porous silicon (PSi) waveguides composed of a guiding layer of low porosity (high refractive index) on a cladding layer with higher porosity (lower refractive index). These can be made by switching the current density from a lower to a higher value during the electrochemical etching process. The applicability of these structures for vapour sensing is investigated and an extremely sensitive PSi-microring resonator is presented.
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